Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749554 | Multi-wafer deposition tool for reducing residual deposition on transfer blades and methods of operating the same | Shunsuke TAKUMA | 2023-09-05 |
| 11702750 | Method and apparatus for depositing a multi-sector film on backside of a semiconductor wafer | Seiji Shimabukuro | 2023-07-18 |