ZL

Zhiyang Li

OI Onto Innovation: 1 patents #3 of 12Top 25%
Overall (2023): #183,487 of 537,848Top 35%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11687010 System and method for correcting overlay errors in a lithographic process Tong Yang 2023-06-27