Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835849 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Tsutomu Yoshimura, Yasunori Yonekuta, Kohei Higashi, Yoichi Nishida | 2023-12-05 |
| 11687001 | Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device | Tsutomu Yoshimura, Yasunori Yonekuta, Kohei Higashi, Yoichi Nishida | 2023-06-27 |