Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658002 | Charged particle beam adjustment method, charged particle beam drawing method, and charged particle beam irradiation apparatus | Takahito Nakayama | 2023-05-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658002 | Charged particle beam adjustment method, charged particle beam drawing method, and charged particle beam irradiation apparatus | Takahito Nakayama | 2023-05-23 |