Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817309 | Method of producing heated ozone water, heated ozone water, and semiconductor wafer-cleaning liquid | Yasuyuki Shirai, Takeshi Sakai | 2023-11-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817309 | Method of producing heated ozone water, heated ozone water, and semiconductor wafer-cleaning liquid | Yasuyuki Shirai, Takeshi Sakai | 2023-11-14 |