Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11567416 | Inspection apparatus and substrate transfer method | Toru Tokimatsu, Takashi Murakami | 2023-01-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11567416 | Inspection apparatus and substrate transfer method | Toru Tokimatsu, Takashi Murakami | 2023-01-31 |