KT

Koki Tanaka

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
Overall (2023): #362,005 of 537,848Top 70%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11637020 Etching method and plasma etching apparatus — 2023-04-25