Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11840011 | Imprint apparatus, imprint method, and method of manufacturing article | — | 2023-12-12 |
| 11718014 | Imprint apparatus, imprint method, and method of manufacturing article | — | 2023-08-08 |
| 11567402 | Imprint apparatus, imprint method, and method of manufacturing article | — | 2023-01-31 |