Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11806810 | Shaping apparatus and shaping method | — | 2023-11-07 |
| 11747736 | Exposure apparatus and exposure method, and device manufacturing method | — | 2023-09-05 |
| 11742299 | Determination method and apparatus, program, information recording medium, exposure apparatus, layout information providing method, layout method, mark detection method, exposure method, and device manufacturing method | — | 2023-08-29 |
| 11691217 | Laser processing device with optical device for changing cross-sectional intensity distribution of a beam at a pupil plane | — | 2023-07-04 |
| 11579532 | Exposure apparatus and exposure method, and device manufacturing method | — | 2023-02-14 |