Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842905 | Stacked substrate manufacturing method, stacked substrate manufacturing apparatus, stacked substrate manufacturing system, and substrate processing apparatus | Hajime MITSUISHI | 2023-12-12 |
| 11823935 | Stacking apparatus and stacking method | Hajime MITSUISHI, Minoru Fukuda | 2023-11-21 |
| 11791223 | Substrate bonding apparatus and substrate bonding method | Eiji ARIIZUMI, Yoshiaki Kito, Mikio Ushijima, Masanori ARAMATA, Naoto KIRIBE +4 more | 2023-10-17 |