Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715629 | Plasma processing device member, plasma processing device comprising said plasma processing device member, and method for manufacturing plasma processing device member | Kazuhiro Ishikawa, Shuichi Saito | 2023-08-01 |
| 11592419 | Sensor element for gas sensor | Ryo HAYASE | 2023-02-28 |
| 11579112 | Gas sensor element | — | 2023-02-14 |
| 11579113 | Gas sensor element | — | 2023-02-14 |
| 11572275 | Aluminum nitride film, method of manufacturing aluminum nitride film, and high withstand voltage component | Atsushi Yumoto, Mari SHIMIZU, Tetsuo Inoue, Shuichi Saito | 2023-02-07 |
| 11567033 | Sensor element | Yusuke Watanabe, Mika Kai | 2023-01-31 |