Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784068 | Member for semiconductor manufacturing apparatus and method for manufacturing the same | Hiroshi Takebayashi | 2023-10-10 |
| 11784078 | Wafer placement apparatus | — | 2023-10-10 |
| 11600510 | Electrostatic chuck heater | — | 2023-03-07 |