Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798826 | Wafer-measuring apparatus and wafer-transferring method thereof | — | 2023-10-24 |
| 11728194 | Wafer handling apparatus and method of operating the same | Meng-Liang Wei | 2023-08-15 |
| 11631604 | Load port device, gas gate and gas-providing method | Sun-Fu Chou | 2023-04-18 |