Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776904 | Semiconductor device with carbon hard mask and method for fabricating the same | — | 2023-10-03 |
| 11742209 | Method for preparing semiconductor device with air gap in pattern-dense region | — | 2023-08-29 |
| 11574914 | Method for fabricating semiconductor device including capacitor structure | — | 2023-02-07 |
| 11545431 | Semiconductor device with carbon hard mask and method for fabricating the same | — | 2023-01-03 |