Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11753296 | MEMS device and method for manufacturing mems device | — | 2023-09-12 |
| 11757425 | Resonance device and method for producing resonance device | Kentarou Dehara | 2023-09-12 |
| 11597648 | MEMS device manufacturing method and mems device | — | 2023-03-07 |