Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854839 | Valve apparatuses and related methods for reactive process gas isolation and facilitating purge during isolation | Andrew Cowe | 2023-12-26 |
| 11745229 | Endpoint detection of deposition cleaning in a pumping line and a processing chamber | — | 2023-09-05 |
| 11664197 | Method and apparatus for plasma generation | Andrew Cowe, Ron Collins, Larry Bourget | 2023-05-30 |