Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11613809 | Solid vaporization/supply system of metal halide for thin film deposition | Hiroshi Matsumoto | 2023-03-28 |
| 11566326 | Vaporizable source material container and solid vaporization/supply system using the same | Hiroshi Matsumoto | 2023-01-31 |