Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11597896 | Cleaning liquid, cleaning method, and method for producing semiconductor wafer | Toshiaki Shibata, Ken Harada, Atsushi Ito, Tomohiro Kusano, Yutaro Takeshita | 2023-03-07 |