Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11845822 | Polymer, resist composition, method for manufacturing substrate having pattern formed therein, and (meth) acrylic ester and production method therefor | Kazuaki Mukai, Yoshihiro Kamon, Satoshi Sakuma, Ryuichi Ansai | 2023-12-19 |