Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11623175 | Apparatus for trapping of reaction by-product having self regenerating function for used inner collecting tower | In Mun Hwang, In Hwan Kim, Jun Min Lee | 2023-04-11 |
| 11562943 | Apparatus for collecting by-product in semiconductor manufacturing process | Yeon Ju Lee, Myung Pil Han | 2023-01-24 |
| 11555243 | Apparatus for trapping reaction by-product produced during organic film deposition process | Yeon Ju Lee, Pyung Hee Son, Jin Woong Kim | 2023-01-17 |