Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728123 | Charged particle blocking element, exposure apparatus comprising such an element, and method for using such an exposure apparatus | Derk Ferdinand WALVOORT | 2023-08-15 |
| 11705252 | Vacuum chamber arrangement for charged particle beam generator | Willem Henk Urbanus, Marco Jan-Jaco Wieland | 2023-07-18 |