Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11753718 | SiO2 thin film produced by atomic layer deposition at room temperature | Didier Arl, Damien Lenoble | 2023-09-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11753718 | SiO2 thin film produced by atomic layer deposition at room temperature | Didier Arl, Damien Lenoble | 2023-09-12 |