Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11567247 | Plasma etching method using faraday cage | Eun Kyu Her, Jeong-Ho Park, Seong Min Park, Bu Gon Shin | 2023-01-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11567247 | Plasma etching method using faraday cage | Eun Kyu Her, Jeong-Ho Park, Seong Min Park, Bu Gon Shin | 2023-01-31 |