Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11710654 | Substrate transport apparatus, substrate processing apparatus, and substrate transport method | Byoung Doo CHOI | 2023-07-25 |
| 11618759 | Ligand compound, transition metal compound, and catalyst composition including the same | A Rim Kim, Seung Hwan Jung | 2023-04-04 |