Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11832533 | Conformal damage-free encapsulation of chalcogenide materials | James S. Sims, Andrew John McKerrow, Meihua Shen, Shane Tang, Kathryn M. Kelchner +4 more | 2023-11-28 |
| 11796085 | Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment | Mariusch Gregor, Theodoros Panagopoulos | 2023-10-24 |
| 11792987 | Self-aligned vertical integration of three-terminal memory devices | Meihua Shen, John Hoang, Hui-Jung Wu, Gereng Gunawan, Yang Pan | 2023-10-17 |
| 11637022 | Electron excitation atomic layer etch | Ivan L. Berry, III, Andreas Fischer | 2023-04-25 |