TL

Thorsten Lill

Lam Research: 4 patents #4 of 269Top 2%
Overall (2023): #37,709 of 537,848Top 8%
4
Patents 2023

Issued Patents 2023

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
11832533 Conformal damage-free encapsulation of chalcogenide materials James S. Sims, Andrew John McKerrow, Meihua Shen, Shane Tang, Kathryn M. Kelchner +4 more 2023-11-28
11796085 Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment Mariusch Gregor, Theodoros Panagopoulos 2023-10-24
11792987 Self-aligned vertical integration of three-terminal memory devices Meihua Shen, John Hoang, Hui-Jung Wu, Gereng Gunawan, Yang Pan 2023-10-17
11637022 Electron excitation atomic layer etch Ivan L. Berry, III, Andreas Fischer 2023-04-25