Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11834736 | Systems and methods for pulse width modulated dose control | — | 2023-12-05 |
| 11796085 | Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment | Theodoros Panagopoulos, Thorsten Lill | 2023-10-24 |
| 11542598 | Systems and methods for pulse width modulated dose control | — | 2023-01-03 |