TL

Ta-Yu Lo

Lam Research: 1 patents #79 of 269Top 30%
Overall (2023): #235,632 of 537,848Top 45%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11854792 Systems and methods for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structures Dries Dictus 2023-12-26