Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11756771 | Tunable upper plasma-exclusion-zone ring for a bevel etcher | Adam Liron, Gregory Sexton | 2023-09-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11756771 | Tunable upper plasma-exclusion-zone ring for a bevel etcher | Adam Liron, Gregory Sexton | 2023-09-12 |