Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11694911 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Dengliang Yang, David Cheung, Gnanamani Amburose, Eunsuk Ko, Weiyi Luo +1 more | 2023-07-04 |