Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705357 | Substrate processing system including electrostatic chuck and method for manufacturing electrostatic chuck | Sang Kee LEE | 2023-07-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705357 | Substrate processing system including electrostatic chuck and method for manufacturing electrostatic chuck | Sang Kee LEE | 2023-07-18 |