Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776819 | Point etching module using annular surface dielectric barrier discharge apparatus and method for control etching profile of point etching module | Dong Chan Seok, Tai Hyeop Lho, Yong Ho Jung, Yong-Sup Choi, Kang Lee +1 more | 2023-10-03 |