Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789359 | Method for manufacturing pellicle for extreme ultraviolet lithography having graphene defect healing layer | Hyun Mi Kim, Jin-woo Cho, Seul Gi Kim, Jun Hyeok Jeon | 2023-10-17 |