Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11549180 | Apparatus and method for atomic layer deposition | Diederik Jan Maas, Axel Sebastiaan Lexmond, Carolus Ida Maria Antonius Spee, Antonie Ellert Duisterwinkel, Adrianus Johannes Petrus Maria Vermeer | 2023-01-10 |