Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11581200 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Moriya, Naoharu Nakaiso, Takahiro MIYAKURA | 2023-02-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11581200 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Moriya, Naoharu Nakaiso, Takahiro MIYAKURA | 2023-02-14 |