Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823946 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | — | 2023-11-21 |
| 11555246 | Substrate processing apparatus and method of manufacturing semiconductor device | Hironori Shimada | 2023-01-17 |