Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676266 | Method and apparatus for inspecting pattern collapse defects | Shin-Yee Lu | 2023-06-13 |
| 11664283 | Raman sensor for supercritical fluids metrology | — | 2023-05-30 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676266 | Method and apparatus for inspecting pattern collapse defects | Shin-Yee Lu | 2023-06-13 |
| 11664283 | Raman sensor for supercritical fluids metrology | — | 2023-05-30 |