Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11733605 | EUV in-situ linearity calibration for TDI image sensors using test photomasks | Haifeng Huang, Rui-fang Shi | 2023-08-22 |
| 11624904 | Vapor as a protectant and lifetime extender in optical systems | David Jalil Zare, Eduardo Soto, I-Fan Wu, Joseph Walsh, Kent McKernan +5 more | 2023-04-11 |