Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791305 | Manufacturing apparatus, operation method thereof, and method for manufacturing semiconductor device | — | 2023-10-17 |
| 11776931 | Substrate bonding apparatus, manufacturing system, and semiconductor device manufacturing method | — | 2023-10-03 |
| 11646239 | Registration mark, positional deviation detection method and device, and method for manufacturing semiconductor device | — | 2023-05-09 |
| 11551934 | Wafer separating method | — | 2023-01-10 |