Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11839968 | Substrate transfer device and method of operating the same | Takayuki Fukushima, Shogo Matsuoka, Hiroyuki Okada | 2023-12-12 |
| 11837485 | Substrate holding hand and substrate conveying apparatus | Tetsuya Yoshida, Ryosuke Kanamaru, Takayuki Fukushima | 2023-12-05 |