Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749547 | Substrate transfer apparatus and substrate placement portion rotation axis searching method | Kenji Noguchi, Hiroyuki Okada | 2023-09-05 |
| 11654578 | Robot system and offset acquisition method | Hajime Nakahara, George Chin, Luc Nguyen | 2023-05-23 |
| 11554498 | Wafer jig, robot system, communication method, and robot teaching method | Hajime Nakahara | 2023-01-17 |
| 11551953 | Substrate transfer apparatus and method for calculating positional relationship between substrate transfer robot and substrate placement portion | Kenji Noguchi, Hiroyuki Okada | 2023-01-10 |