Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11740548 | Ultra-thin, ultra-low density films for EUV lithography | Marcio D. Lima | 2023-08-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11740548 | Ultra-thin, ultra-low density films for EUV lithography | Marcio D. Lima | 2023-08-29 |