Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11651969 | Etching method, semiconductor manufacturing apparatus, and method of manufacturing semiconductor device | Chihiro Abe, Toshiyuki Sasaki, Hisataka Hayashi, Mitsuhiro Omura | 2023-05-16 |