Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11833550 | Substrate processing apparatus and substrate processing method | Masatoshi Terayama | 2023-12-05 |
| 11651953 | Method for cleaning substrate and cleaning device | Hideaki Sakurai, Kyo Otsubo, Tetsuo TAKEMOTO | 2023-05-16 |