Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848224 | Electrostatic chuck and substrate fixing device | Naoyuki Koizumi, Kazunori SHIMIZU | 2023-12-19 |
| 11617991 | Separation film | Yoichiro Kozaki, Masakazu Koiwa, Fumi Hojo, Satoko Kanamori, Masato Yanagibashi | 2023-04-04 |