Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11813694 | Laser processing apparatus, laser processing method, and method for manufacturing semiconductor apparatus | Naoyuki Kobayashi, Masashi Machida | 2023-11-14 |
| 11676831 | Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device | Takahiro Fuji, Yoshihiro Yamaguchi | 2023-06-13 |