Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837439 | Inductively coupled plasma treatment system | Haiyang Liu, Xiaobo Liu, Xuedong Li, Na Li, Shiran CHENG +2 more | 2023-12-05 |
| 11735400 | Faraday cleaning device and plasma processing system | Haiyang Liu, Dongdong HU, Xiaobo Liu, Na Li, Shiran CHENG +2 more | 2023-08-22 |