Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11692263 | Coating control using forward parameter correction and adapted reverse engineering | Zhao Yuan, Georg J. Ockenfuss, Marius Grigonis, Andrew Clark, Donggong Peng +3 more | 2023-07-04 |
| 11542596 | Optical monitor | Benjamin F. Catching | 2023-01-03 |