Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11681227 | Enhanced EUV photoresist materials, formulations and processes | Carmen Popescu, John Roth, Andreas Frommhold, Edward A. Jackson, Alexandra McClelland +2 more | 2023-06-20 |