Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821068 | Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films | Roman Chistyakov | 2023-11-21 |
| 11823859 | Sputtering a layer on a substrate using a high-energy density plasma magnetron | — | 2023-11-21 |