Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11597997 | Apparatus, method, and recording medium storing command for controlling thin-film deposition process | — | 2023-03-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11597997 | Apparatus, method, and recording medium storing command for controlling thin-film deposition process | — | 2023-03-07 |